Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings

Type:
Journal
Info:
OPTICAL MATERIALS EXPRESS, Vol. 5, No. 1, 1 Jan 2015.
Date:
2014-12-05

Author Information

Name Institution
Thomas PaulFraunhofer Institute for Applied Optics and Precision Engineering

Films

Plasma TiO2


Film/Plasma Properties

Substrates

Notes

212