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Plasma-Enhanced Atomic Layer Deposition of Nanoscale Yttria-Stabilized Zirconia Electrolyte for Solid Oxide Fuel Cells with Porous Substrate
Type:
Journal
Info:
ACS Appl. Mater. Interfaces 2015, 7, 2998-3002
Date:
2015-01-27
Author Information
| Name | Institution |
|---|---|
| Sanghoon Ji | Seoul National University |
| Gu Young Cho | Seoul National University |
| Wonjong Yu | Seoul National University |
| Pei-Chen Su | Nanyang Technological University |
| Min Hwan Lee | University of California - Merced |
| Suk Won Cha | Seoul National University |
Films
Plasma YSZ
Film/Plasma Properties
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Substrates
| AAO, Anodic Aluminum Oxide |
Notes
| CN1 Atomic Premium PEALD YSZ for fuel cell electrolyte. |
| 322 |