Publication Information

Title: Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films

Type: Journal

Info: Nanotechnology 26 (2015) 265702

Date: 2015-06-09

DOI: http://dx.doi.org/10.1088/0957-4484/26/26/265702

Author Information

Name

Institution

National Taiwan University

National Taiwan University

National Taiwan University

National Taiwan University

National Taiwan University

National Taiwan University

National Taiwan University

National Taiwan University

National Taiwan University

Films

Thermal ZnO using Beneq TFS-200

Deposition Temperature = 180C

557-20-0

7732-18-5

Plasma TiO2 using Beneq TFS-200

Deposition Temperature = 200C

3275-24-9

7782-44-7

Plasma ZrO2 using Beneq TFS-200

Deposition Temperature = 200C

175923-04-3

7782-44-7

Plasma Ag using Beneq TFS-200

Deposition Temperature = 120C

165461-74-5

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

TEM, Transmission Electron Microscope

JEOL 2100F

Thickness

TEM, Transmission Electron Microscope

JEOL 2100F

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

FEI Nova NanoSEM 450

Raman Spectra

Raman Spectroscopy

Uni-RAM

Optical Properties

Optical Absorption

Avantes AvaSpec-2048L

Refractive Index

Ellipsometry

Ellipso Technology Elli-SE

Extinction Coefficient

Ellipsometry

Ellipso Technology Elli-SE

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

GIXRD, Grazing Incidence X-Ray Diffraction

Unknown

Substrates

Silicon

TiO2

ZrO2

Keywords

Notes

373

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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