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Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2019, 11 (40), pp 37229-37238
Date:
2019-09-16
Author Information
| Name | Institution |
|---|---|
| Michiel Van Daele | Ghent University |
| Matthew B. E. Griffiths | Ghent University |
| Ali Raza | Ghent University |
| Matthias M. Minjauw | Ghent University |
| Eduardo Solano | ALBA Synchrotron Light Source, NCD-SWEET Beamline |
| Ji-Yu Feng | Ghent University |
| Ranjith K. Ramachandran | Ghent University |
| Stephane Clemmen | Ghent University |
| Roel Baets | Ghent University |
| Sean T. Barry | Carleton University |
| Christophe Detavernier | Ghent University |
| Jolien Dendooven | Ghent University |
Films
Plasma Au
Film/Plasma Properties
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Thickness
Analysis: XRF, X-Ray Fluorescence
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: GISAXS, Grazing Incidence Small Angle X-ray Scattering
Characteristic: Surface Enhancement
Analysis: SERS, Surface Enhanced Raman Scattering
Characteristic: Raman Spectra
Analysis: Raman Spectroscopy
Substrates
| Si(100) |
| SiO2 |
| Au |
Notes
| 1683 |