Publication Information

Title: Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition

Type: Journal

Info: Coatings 2017, 7, 118

Date: 2017-08-03

DOI: http://dx.doi.org/10.3390/coatings7080118

Author Information

Name

Institution

Friedrich-Schiller-Universität Jena

Fraunhofer Institute for Applied Optics and Precision Engineering

Friedrich-Schiller-Universität Jena

Friedrich-Schiller-Universität Jena

Films

Deposition Temperature = 100C

15112-89-7

7782-44-7

Deposition Temperature = 100C

75-24-1

7782-44-7

Deposition Temperature = 100C

546-68-9

7782-44-7

Thermal Al2O3 using Picosun R200

Deposition Temperature = 300C

7722-84-1

Thermal Ta2O5 using Picosun R200

Deposition Temperature = 300C

6074-84-6

7722-84-1

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000

Refractive Index

Ellipsometry

J.A. Woollam M-2000

Refractive Index

Spectrophotometry

Unknown

Reflectivity

Optical Reflectivity

PerkinElmer lambda 950 Spectrophotometer

Transmittance

Optical Transmission

PerkinElmer lambda 950 Spectrophotometer

Substrates

Keywords

AR, AntiReflective Coating

Notes

989

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