Publication Information

Title: Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor

Type: Journal

Info: Journal of Vacuum Science & Technology A 34, 01A136 (2016)

Date: 2015-12-01

DOI: http://dx.doi.org/10.1116/1.4937734

Author Information

Name

Institution

Seoul National University

Stanford University

Gachon University

Seoul National University

Seoul National University

Seoul National University

Seoul National University

Films

Deposition Temperature = 325C

27804-64-4

7664-41-7

Deposition Temperature = 325C

0-0-0

7664-41-7

Deposition Temperature = 325C

0-0-0

7664-41-7

Deposition Temperature = 325C

908831-34-5

7664-41-7

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Gaertner L116D

Refractive Index

Ellipsometry

Gaertner L116D

Thickness

XRR, X-Ray Reflectivity

PANalytical Xpert PRO MPD X-ray Diffractometer

Chemical Composition, Impurities

AES, Auger Electron Spectroscopy

Perkin Elmer PHI600

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG Sigma Probe

Chemical Composition, Impurities

FTIR, Fourier Transform InfraRed spectroscopy

Bruker Optics Tensor 27

Electrical Properties

Unknown

HP 4140

Substrates

Silicon

Keywords

Notes

Investigated adding Ar plasma after Si precursor for activation. Also used multiple Si precursor-Ar plasma steps prior to NH3 plasma step.

445

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com