Title: Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
Type: Conference Proceedings
Info: IEICE Tech. Rep., vol. 115, no. 329, ED2015-81, pp. 69-72, Nov. 2015.
IRAS, Infrared Reflection Absorption Spectroscopy
XPS, X-ray Photoelectron Spectroscopy
TMG adsorption at room temperature and NH3 plasma at 115C.
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: firstname.lastname@example.org
© 2014-2017 plasma-ald.com