Publication Information

Title: Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films

Type: Journal

Info: Journal of The Electrochemical Society, 157 (7) P66-P74 (2010)

Date: 2010-04-16

DOI: http://dx.doi.org/10.1149/1.3428705

Author Information

Name

Institution

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Films

Deposition Temperature Range = 25-400C

75-24-1

7782-44-7

Deposition Temperature Range = 25-400C

75-24-1

7782-44-7

Deposition Temperature Range = 25-400C

75-24-1

7732-18-5

Deposition Temperature Range = 25-400C

75-24-1

7732-18-5

Deposition Temperature Range = 25-400C

546-68-9

7782-44-7

Plasma TiO2 using Custom ICP

Deposition Temperature Range = 100-400C

0-0-0

7782-44-7

Plasma TiO2 using Custom ICP

Deposition Temperature Range = 100-400C

123927-75-3

7782-44-7

Deposition Temperature Range = 50-300C

19824-59-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000

Density

Ellipsometry

J.A. Woollam M-2000

Density

RBS, Rutherford Backscattering Spectrometry

Unknown

Chemical Composition, Impurities

RBS, Rutherford Backscattering Spectrometry

Unknown

Chemical Composition, Impurities

TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

Unknown

Substrates

Si(100)

Keywords

Plasma vs Thermal Comparison

Low-Temperature

Notes

709

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com