Title: Metal-semiconductor-metal ultraviolet photodetectors based on gallium nitride grown by atomic layer deposition at low temperatures
Info: Optical Engineering 53(10), 107106 (October 2014)
J.A. Woollam VASE
I-V, Current-Voltage Measurements
Ultratech Fiji PEALD GaN for UV MSM photodetector.
Meaglow plasma source used.
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