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Total-dose radiation response and and post-irradiation annealing response of Hafnium capacitors
Type:
Conference Proceedings
Info:
2016 Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Application of Polar Dielectrics, and Piezoelectric Force Microscopy Workshop (ISAF/ECAPD/PFM)
Date:
2016-08-21
Author Information
| Name | Institution |
|---|---|
| Xin Liu | Xi'an Jiaotong University |
| Yuqiu Lei | Xi'an Jiaotong University |
| Yonghong Cheng | Xi'an Jiaotong University |
Films
Film/Plasma Properties
Characteristic: Midgap Voltage
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Interface Trap Density
Analysis: C-V, Capacitance-Voltage Measurements
Substrates
| Silicon |
Notes
| 973 |