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Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
Type:
Journal
Info:
ECS J. Solid State Sci. Technol. 2012 volume 1, issue 4, Q63-Q69
Date:
2012-07-02
Author Information
| Name | Institution |
|---|---|
| Jaesang Lee | Hanyang University |
| Seung Jae Lee | Hanyang University |
| Won Bae Han | Hanyang University |
| Heeyoung Jeon | Hanyang University |
| Jingyu Park | Hanyang University |
| Hyungjun Kim | Hanyang University |
| Chong Seung Yoon | Hanyang University |
| Hyeongtag Jeon | Hanyang University |
Films
Plasma TiO2
Film/Plasma Properties
Characteristic: Photocatalytic Activity
Analysis: Custom
Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Characteristic: Compositional Depth Profiling
Analysis: AES, Auger Electron Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Substrates
| Si(100) |
Notes
| 641 |