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Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
Type:
Journal
Info:
Journal of The Electrochemical Society, 155(10) G185-G188 (2008)
Date:
2008-08-01
Author Information
| Name | Institution |
|---|---|
| Ji-Hoon Ahn | Korea Advanced Institute of Science and Technology |
| Sang-Won Kang | Korea Advanced Institute of Science and Technology |
| Ja-Yong Kim | Hynix Semiconductor |
| Jin-Hyock Kim | Hynix Semiconductor |
| Jae-Sung Roh | Hynix Semiconductor |
Films
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Dielectric Constant, Permittivity
Analysis: C-V, Capacitance-Voltage Measurements
Substrates
| SrRuO |
| Ru |
Notes
| Sr(DPM)2 was dissolved in butyl acetate and supplied via liquid delivery. |
| 600C RTA in N2 for 10min. |
| 126 |