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Single-electron transistors featuring silicon nitride tunnel barriers prepared by atomic layer deposition
Type:
Conference Proceedings
Info:
2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Date:
2016-01-25
Author Information
| Name | Institution |
|---|---|
| Golnaz Karbasian | University of Notre Dame |
| Alexei P. Orlov | University of Notre Dame |
| A. S. Mukasyan | University of Notre Dame |
| Gregory L. Snider | University of Notre Dame |
Films
Plasma SiNx
Film/Plasma Properties
Substrates
| SiO2 |
| Ni |
Notes
| 816 |