Publication Information

Title: The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films

Type: Journal

Info: Chem. Mater. 2009, 21, 4374-4379

Date: 2009-06-20

DOI: http://dx.doi.org/10.1021/cm9005234

Author Information

Name

Institution

Seoul National University

Samsung Electronics Co.

Seoul National University

Seoul National University

Seoul National University

Seoul National University

Films

Deposition Temperature Range = 255-305C

175923-04-3

7782-44-7

Deposition Temperature Range = 255-305C

175923-04-3

10024-97-2

Deposition Temperature = 280C

352535-01-4

7782-44-7

Deposition Temperature = 280C

352535-01-4

10024-97-2

Deposition Temperature = 280C

546-68-9

7782-44-7

Deposition Temperature = 280C

546-68-9

10024-97-2

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Unknown

Areal Density

XRF, X-Ray Fluorescence

Unknown

Capacitance

C-V, Capacitance-Voltage Measurements

HP 4284A LCR

EOT, Equivalent Oxide Thickness

C-V, Capacitance-Voltage Measurements

HP 4284A LCR

Leakage Current

I-V, Current-Voltage Measurements

HP 4194A

Breakdown Voltage

I-V, Current-Voltage Measurements

HP 4285A LCR

Breakdown Voltage Lifetime

I-V, Current-Voltage Measurements

HP 4285A LCR

Compositional Depth Profiling

AES, Auger Electron Spectroscopy

Unknown

Compositional Depth Profiling

XPS, X-ray Photoelectron Spectroscopy

Thermo VG Sigma Probe

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

JEOL JSPM-5200

Substrates

Silicon

Keywords

Notes

733

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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