Title: Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
Info: Applied Surface Science Volume 308, 30 July 2014, Pages 328-332
IRAS, Infrared Reflection Absorption Spectroscopy
Low temperature TiO2 PEALD with TDMAT and H2O plasma.
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: firstname.lastname@example.org
© 2014-2017 plasma-ald.com