Publication Information

Title: High-efficiency embedded transmission grating

Type: Conference Proceedings

Info: Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96271G (September 23, 2015)

Date: 2015-09-07

DOI: http://dx.doi.org/10.1117/12.2191223

Author Information

Name

Institution

Friedrich-Schiller-Universität Jena

Friedrich-Schiller-Universität Jena

Friedrich-Schiller-Universität Jena

Friedrich-Schiller-Universität Jena

Films

Deposition Temperature Range N/A

546-68-9

7782-44-7

Deposition Temperature Range N/A

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Si(100)

SiO2

Keywords

Nanolaminate

Notes

483

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