Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays

Type:
Journal
Info:
Journal of Microelectromechanical Systems, (Volume:PP, Issue: 99) Page(s):1
Date:
2014-07-22

Author Information

Name Institution
M. ShavezipurStanford University

Films

Plasma TiN

Hardware used: Unknown


Film/Plasma Properties

Substrates

Silicon

Notes

PEALD TiN for nanoelectromechanical relay.
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