Publication Information

Title: Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage

Type: Thesis

Info: Niskanen Thesis

Date: 2006-11-10

DOI: No DOI

Author Information

Name

Institution

University of Helsinki

Institute of Ion Beam Physics and Materials Research

University of Helsinki

University of Helsinki

Films

Deposition Temperature Range N/A

6074-84-6

7782-44-7

Deposition Temperature Range N/A

6074-84-6

7732-18-5

Deposition Temperature Range N/A

6074-84-6

7782-44-7

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

GIXRD, Grazing Incidence X-Ray Diffraction

Bruker-Axs D8 Advance diffractometer/reflectometer

Thickness

XRR, X-Ray Reflectivity

Bruker-Axs D8 Advance diffractometer/reflectometer

Density

XRR, X-Ray Reflectivity

Bruker-Axs D8 Advance diffractometer/reflectometer

Morphology, Roughness, Topography

XRR, X-Ray Reflectivity

Bruker-Axs D8 Advance diffractometer/reflectometer

Thickness

Spectrophotometry

Hitachi U-2000 Spectrophotometer

Refractive Index

Spectrophotometry

Hitachi U-2000 Spectrophotometer

Conformality, Step Coverage

SEM, Scanning Electron Microscopy

Hitachi S-4800 Field Emission Scanning Electron Microscope

Leakage Current

I-V, Current-Voltage Measurements

Keithley 2400 Source Meter

Breakdown Voltage

I-V, Current-Voltage Measurements

Keithley 2400 Source Meter

Capacitance

C-V, Capacitance-Voltage Measurements

HP 4284A LCR

Dielectric Constant, Permittivity

C-V, Capacitance-Voltage Measurements

HP 4284A LCR

Chemical Composition, Impurities

TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

Unknown

Substrates

Glass

Silicon

Pt

Keywords

High-k Dielectric Thin Films

Notes

Plasma source limitations require it to be kept on during the entire run with slow power ramping between high and low powers.

Portion of the reactor was replaced by polycarbonate to be compatible with the plasma source.

Used Sairem SURF451 surfatron plasma source.

86

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