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Firing Stable Al2O3/SiNx Layer Stack Passivation for the Front Side Boron Emitter of n-type Silicon Solar Cells
Type:
Conference Proceedings
Info:
25th European PV Solar Energy Conference and Exhibition,6-10 September 2010, Valencia, Spain
Date:
2010-09-06
Author Information
| Name | Institution |
|---|---|
| Armin Richter | Fraunhofer Institute for Solar Energy Systems (ISE) |
| H. Henneck | Fraunhofer Institute for Solar Energy Systems (ISE) |
| J. Benick | Fraunhofer Institute for Solar Energy Systems (ISE) |
| M. Hörteis | Fraunhofer Institute for Solar Energy Systems (ISE) |
| M. Hermle | Fraunhofer Institute for Solar Energy Systems (ISE) |
| S. W. Glunz | Fraunhofer Institute for Solar Energy Systems (ISE) |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Minority Carrier Lifetime
Analysis: QSSPC, Quasi-Steady-State PhotoConductance Decay
Characteristic: Emitter Saturation Current Density
Analysis: -
Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Substrates
| Si(100) |
Notes
| 56 |