Publication Information

Title: New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers

Type: Conference Proceedings

Info: Proc. SPIE 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II

Date: 2016-06-26

DOI: http://dx.doi.org/10.1117/12.2232538

Author Information

Name

Institution

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Films

Plasma TiO2 using Unknown

Deposition Temperature Range = 100-120C

Plasma Al2O3 using Unknown

Deposition Temperature Range = 100-120C

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

SiO2

Keywords

Nanolaminate

Notes

832

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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