Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops

Type:
Journal
Info:
Ultramicroscopy Volume 166, July 2016, Pages 39-47
Date:
2016-04-08

Author Information

Name Institution
Timothy S. EnglishStanford University
J ProvineStanford University
Ann F. MarshallStanford University
Ai Leen KohStanford University
Thomas W. KennyStanford University

Films



Film/Plasma Properties

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

Notes

884