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Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2015, 7 (19), pp 10228-10237
Date:
2015-04-28
Author Information
| Name | Institution |
|---|---|
| Wei-Cheng Wang | National Taiwan University |
| Meng-Chen Tsai | National Taiwan University |
| Jason Yang | Sunrise Global Solar Energy Co. |
| Chuck Hsu | Sino-American Silicon Products Inc. |
| Miin-Jang Chen | National Taiwan University |
Films
Thermal Al2O3
Plasma TiO2
Film/Plasma Properties
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Reflectance Spectra
Analysis: Reflection Spectroscopy
Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Interface State Density
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Fixed Charge
Analysis: C-V, Capacitance-Voltage Measurements
Characteristic: Minority Carrier Lifetime
Analysis: QSSPC, Quasi-Steady-State PhotoConductance Decay
Substrates
| Si(100) |
| NBSi, Nanotextured Black Silicon |
Notes
| Ultratech Fiji thermal Al2O3/plasma TiO2 for silicon solar passivation. |
| 318 |