Publication Information

Title: Comparative study of ALD SiO2 thin films for optical applications

Type: Journal

Info: Optical Materials Express, v. 6, n. 2, p. 660--670 (2016)

Date: 2016-01-18

DOI: http://dx.doi.org/10.1364/OME.6.000660

Author Information

Name

Institution

Friedrich-Schiller-Universität Jena

Fraunhofer Institute for Applied Optics and Precision Engineering

Friedrich-Schiller-Universität Jena

Fraunhofer Institute for Applied Optics and Precision Engineering

Friedrich-Schiller-Universität Jena

Eindhoven University of Technology

Eindhoven University of Technology

Max Planck Institute for Intelligent Systems

Max Planck Institute for Intelligent Systems

Max Planck Institute for Intelligent Systems

VTT Technical Research Centre

Air Products

Laser Zentrum Hannover e.V.

Laser Zentrum Hannover e.V.

Friedrich-Schiller-Universität Jena

Friedrich-Schiller-Universität Jena

Films

Deposition Temperature Range = 100-200C

15112-89-7

7782-44-7

Deposition Temperature = 200C

27804-64-4

7782-44-7

Plasma SiO2 using SENTECH

Deposition Temperature = 200C

27804-64-4

7782-44-7

Thermal SiO2 using Picosun R200

Deposition Temperature = 200C

0-0-0

10028-15-6

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

XRR, X-Ray Reflectivity

Bruker D8 Advance

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Optical Properties

Optical Transmission

PerkinElmer lambda 950 Spectrophotometer

Optical Properties

Optical Reflectivity

PerkinElmer lambda 950 Spectrophotometer

Optical Properties

Laser Calorimetry

Unknown

Substrates

Si(100)

Ta2O5

Lithosil Q1

Glass, BK7

Glass, B270

Keywords

Optical

AR, AntiReflective Coating

Notes

762

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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