Publication Information

Title: A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors

Type: Journal

Info: Journal of Applied Physics 120, 124505 (2016)

Date: 2016-09-02

DOI: http://dx.doi.org/10.1063/1.4962855

Author Information

Name

Institution

Technion-Israel Institute of Technology

Technion-Israel Institute of Technology

Technion-Israel Institute of Technology

Technion-Israel Institute of Technology

Films

Deposition Temperature = 270C

75-24-1

7732-18-5

Deposition Temperature = 270C

19962-11-9

7732-18-5

Deposition Temperature = 270C

75-24-1

19962-11-9

7732-18-5

Deposition Temperature = 270C

75-24-1

7732-18-5

Deposition Temperature = 270C

75-24-1

10028-15-6

Deposition Temperature = 270C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Unknown

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG Sigma Probe

Images

TEM, Transmission Electron Microscope

FEI Titan

Chemical Composition, Impurities

HAADF, High-Angle Annular Dark Field

Unknown

Compositional Depth Profiling

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Unknown

Flat Band Voltage

C-V, Capacitance-Voltage Measurements

Agilent E4980A Precision LCR Meter

Interface Trap Density

C-V, Capacitance-Voltage Measurements

Agilent E4980A Precision LCR Meter

Dielectric Constant, Permittivity

C-V, Capacitance-Voltage Measurements

Agilent E4980A Precision LCR Meter

Hysteresis

C-V, Capacitance-Voltage Measurements

Agilent E4980A Precision LCR Meter

Dispersion

C-V, Capacitance-Voltage Measurements

Agilent E4980A Precision LCR Meter

Leakage Current

I-V, Current-Voltage Measurements

HP 4140

Substrates

InGaAs

Keywords

Plasma vs Thermal Comparison

Notes

791

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com