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Composite materials and nanoporous thin layers made by atomic layer deposition
Type:
Conference Proceedings
Info:
Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V
Date:
2015-09-01
Author Information
| Name | Institution |
|---|---|
| Lilit Ghazaryan | Friedrich-Schiller-Universität Jena |
| Ernst-Bernhard Kley | Friedrich-Schiller-Universität Jena |
| Andreas Tünnermann | Friedrich-Schiller-Universität Jena |
| Adriana Szeghalmi | Friedrich-Schiller-Universität Jena |
Films
Plasma AlSixOy
Film/Plasma Properties
Characteristic: Etch Rate
Analysis: Custom
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Substrates
| Silicon |
Notes
| 978 |