Effects of carbon contaminations on Y2O3-stabilized ZrO2 thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells

Type:
Journal
Info:
CIRP Annals - Manufacturing Technology 65 (2016) 515-518
Date:
2016-06-01

Author Information

Name Institution
Suk Won ChaSeoul National University
Gu Young ChoSeoul National University
Yeageun LeeSeoul National University
Taehyun ParkSeoul National University
Yusung KimSeoul National University
Jang-moo LeeSeoul National University

Films



Thermal Y2O3



Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Substrates

Notes

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