Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride

Type:
Journal
Info:
JOURNAL OF APPLIED PHYSICS 116, 123702 (2014)
Date:
2014-09-06

Author Information

Name Institution
Jialing YangArizona State University

Films




Film/Plasma Properties

Substrates

Notes

233