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Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Proc. SPIE 8820, Nanoepitaxy: Materials and Devices V, 88200Y (September 19, 2013);
Date:
2013-09-13
Author Information
| Name | Institution |
|---|---|
| David M. Fryauf | University of California - Santa Cruz |
| Andrew C. Phillips | University of California - Santa Cruz |
| Nobuhiko P. Kobayashi | University of California Observatories |
Films
Film/Plasma Properties
Characteristic: Diffusion Barrier Properties
Analysis: -
Characteristic: Reflectivity
Analysis: Optical Reflectivity
Characteristic: Optical Properties
Analysis: Optical Absorption
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Substrates
| YF3 |
| Y2O3 |
| HfO2 |
| TiO2 |
Notes
| 582 |