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Publication Information

Title: Room temperature CO2 detection using interdigitated capacitors with heteropolysiloxane sensing films

Type: Conference Proceedings

Info: 2016 IEEE SENSORS

Date: 2016-10-30

DOI: http://dx.doi.org/10.1109/ICSENS.2016.7808461

Author Information

Name

Institution

Georgia Institute of Technology

Georgia Institute of Technology

Georgia Institute of Technology

Georgia Institute of Technology

Georgia Institute of Technology

Films

Plasma SiO2 using Unknown

Deposition Temperature = 250C

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

966

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