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Optical and Electrical Properties of AlxTi1-xO Films
Type:
Journal
Info:
Journal of the Korean Physical Society, Vol. 56, No. 1, January 2010, pp. 96-99
Date:
2009-10-12
Author Information
| Name | Institution |
|---|---|
| Jung Wook Lim | Electronics and Telecommunication Research Institute, (ETRI) |
| Sun Jin Yun | Electronics and Telecommunication Research Institute, (ETRI) |
| Seong Hyun Lee | University of Science and Technology |
Films
Film/Plasma Properties
Characteristic: Compositional Depth Profiling
Analysis: AES, Auger Electron Spectroscopy
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements
Characteristic: Reflectivity
Analysis: -
Substrates
| Si(100) |
| ITO |
Notes
| 40 |