Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
Type:
Journal
Info:
Semiconductors, 2016, Vol. 50, No. 5, pp 632--638.
Date:
2015-09-08
Author Information
Name | Institution |
---|---|
Vladimir P. Popov | Russian Academy of Sciences |
Mikhail A. Ilnitskii | Russian Academy of Sciences |
E. D. Zhanaev | Russian Academy of Sciences |
A. V. Myakon'kich | Russian Academy of Sciences |
Konstantin V. Rudenko | Russian Academy of Sciences |
Alexander V. Glukhov | Novosibirsk Semiconductor Device Plant and Design Bureau |
Films
Plasma Al2O3
Film/Plasma Properties
Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Characteristic: Diffusion Barrier Properties
Analysis: -
Substrates
Notes
618 |