Publication Information

Title: Plasma enhanced atomic layer deposition of zinc sulfide thin films

Type: Journal

Info: Journal of Vacuum Science & Technology A 35, 01B111 (2017)

Date: 2016-10-27

DOI: http://dx.doi.org/10.1116/1.4967724

Author Information

Name

Institution

Ghent University

Ghent University

Ghent University

Ghent University

Films

Plasma ZnS using Custom ICP

Deposition Temperature Range = 60-300C

557-20-0

7783-06-4

7440-37-1

Thermal ZnS using Custom ICP

Deposition Temperature Range = 60-300C

557-20-0

7783-06-4

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Transmittance

Optical Transmission

PerkinElmer lambda 950 Spectrophotometer

Conformality, Step Coverage

SEM, Scanning Electron Microscopy

Unknown

Images

SEM, Scanning Electron Microscopy

Unknown

Thickness

Ellipsometry

J.A. Woollam M-2000

Thickness

XRR, X-Ray Reflectivity

Bruker D8 Discover

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG-Scientific theta probe

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Bruker D8 Discover

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Unknown

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Bruker Dimension Edge

Plasma Species

OES, Optical Emission Spectroscopy

Ocean Optics QE Pro

Gas Phase Species

QMS, Quadrupole Mass Spectrometer

Hiden HPR-30

Substrates

SiO2

Quartz

Keywords

Plasma vs Thermal Comparison

Notes

895

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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