Publication Information

Title: In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition

Type: Journal

Info: Journal of Vacuum Science & Technology A 30, 01A158 (2012)

Date: 2011-11-18

DOI: http://dx.doi.org/10.1116/1.3670404

Author Information

Name

Institution

Colorado School of Mines

Colorado School of Mines

Films

Plasma TiO2 using Custom

Deposition Temperature Range N/A

546-68-9

7782-44-7

Thermal TiO2 using Custom

Deposition Temperature Range N/A

546-68-9

7732-18-5

Thermal TiO2 using Custom

Deposition Temperature Range N/A

546-68-9

10028-15-6

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Gas Phase Species

OES, Optical Emission Spectroscopy

Ocean Optics S2000

Surface Reactions

ATR-FTIR

Nicolet 6700

Thickness

Ellipsometry

J.A. Woollam M-44

Chemical Composition, Impurities

FTIR, Fourier Transform InfraRed spectroscopy

Nicolet 6700

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Siemens Kristalloflex 810

Substrates

Keywords

Plasma vs Thermal Comparison

Notes

651

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com