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Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
Type:
Journal
Info:
Nanoscale Research Letters 2014, 9:223
Date:
2014-04-11
Author Information
| Name | Institution |
|---|---|
| Tim Bulow | Technische Universität Braunschweig |
| Hassan Gargouri | Sentech Instruments GmbH |
| Mirko Siebert | Sentech Instruments GmbH |
| Rolf Rudolph | Sentech Instruments GmbH |
| Hans-Hermann Johannes | Technische Universität Braunschweig |
| Wolfgang Kowalsky | Technische Universität Braunschweig |
Films
Film/Plasma Properties
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Substrates
| PEN, Polyethylene Napthalate |
Notes
| 218 |