The publication database currently has 1700 entries.
Use Advanced Search for more complex searches
Innatiux is a retained executive recruiting firm with a focus on the search and placement of proven leaders for client companies in the field of high-tech capital equipment and analytical instrumentation. We are seeking WW technical and business leaders with a background in semiconductor deposition to fill confidential senior and executive level positions with our clients. Visit us at: www.innatiux.com
Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
Type:
Journal
Info:
Beilstein J. Nanotechnol. 2013, 4, 750-757.
Date:
2013-10-24
Author Information
| Name | Institution |
|---|---|
| Cathy Bugot | Institut de Recherche et Développement sur l'Energie Photovoltaïque (IRDEP) |
| Nathanaëlle Schneider | Institut de Recherche et Développement sur l'Energie Photovoltaïque (IRDEP) |
| Daniel Lincot | Institut de Recherche et Développement sur l'Energie Photovoltaïque (IRDEP) |
| Frédérique Donsanti | Institut de Recherche et Développement sur l'Energie Photovoltaïque (IRDEP) |
Films
Thermal In2S3
Other In2(S,O)3
Plasma In2(S,O)3
Film/Plasma Properties
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Characteristic: Optical Properties
Analysis: Optical Transmission
Characteristic: Optical Properties
Analysis: Optical Reflectivity
Characteristic: Band Gap
Analysis: Optical Absorption
Characteristic: Thickness
Analysis: Profilometry
Substrates
| Glass |
| Si(100) |
Notes
| O2 plasma radicals appear to exchange for S regardless if it was preceded by an In(acac)3 pulse. |
| In2(S,O)3 only worked with O2 plasma as O-source. |
| Picosun SUNALE R-200 mixed thermal and plasma ALD study of In2(O,S)3, In2S3, and In2O3 for CIGS solar cell absorber layer. |
| 165 |