Publication Information

Title: Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode

Type: Journal

Info: Nanotechnology 27 (2016) 305701

Date: 2016-05-17

DOI: http://dx.doi.org/10.1088/0957-4484/27/30/305701

Author Information

Name

Institution

Universidade do Vale do Paraí­ba (Univap)

Universidade do Vale do Paraí­ba (Univap)

Universidade do Vale do Paraí­ba (Univap)

Universidade do Vale do Paraí­ba (Univap)

Instituto Nacional de Pesquisas Espaciais (INPE)

Instituto Tecnológico de Aeronáutica (ITA-DCTA)

Space Research and Technology Institute

Universidade do Vale do Paraí­ba (Univap)

Universidade do Vale do Paraí­ba (Univap)

Films

Plasma TiO2 using Beneq TFS-200

Deposition Temperature = 250C

7550-45-0

7782-44-7

Plasma TiO2 using Beneq TFS-200

Deposition Temperature = 250C

546-68-9

7782-44-7

Thermal TiO2 using Beneq TFS-200

Deposition Temperature = 250C

7550-45-0

7732-18-5

Thermal TiO2 using Beneq TFS-200

Deposition Temperature = 250C

546-68-9

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

RBS, Rutherford Backscattering Spectrometry

Unknown

Thickness

Ellipsometry

Horiba Jobin Yvon UVISEL

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

GIXRD, Grazing Incidence X-Ray Diffraction

Shimadzu XRD 6000

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Mira Tescan

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Substrates

Si(100)

Keywords

Notes

902

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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