Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation

Type:
Journal
Info:
Nanotechnology 27 (2016) 034001
Date:
2015-11-03

Author Information

Name Institution
Adriaan J. M. MackusEindhoven University of Technology
Matthieu J. WeberEindhoven University of Technology
Nick F. W. ThissenEindhoven University of Technology
Diana Garcia-AlonsoEindhoven University of Technology
René H. J. VervuurtEindhoven University of Technology
Simone AssaliEindhoven University of Technology
Ageeth A. BolEindhoven University of Technology
Marcel A. VerheijenEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology

Films

Plasma Pd


Plasma Pt

Hardware used: Unknown


Film/Plasma Properties

Substrates

Notes

428