Fully CMOS-compatible titanium nitride nanoantennas

Type:
Journal
Info:
Applied Physics Letters 108, 051110 (2016)
Date:
2016-01-24

Author Information

Name Institution
Justin A. BriggsStanford University
Gururaj V. NaikStanford University
Trevor A. PetachStanford University
Brian K. BaumStanford University
David Goldhaber-GordonStanford University
Jennifer A. DionneStanford University

Films


Film/Plasma Properties

Characteristic: Optical Properties
Analysis: Ellipsometry

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Resistivity, Sheet Resistance
Analysis: van der Pauw sheet resistance

Characteristic: Resistivity, Sheet Resistance
Analysis: van der Pauw sheet resistance

Substrates

MgO

Notes

Good information in supplement.
763