Fixed Charge Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Fixed Charge returned 26 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1AlN passivation by plasma-enhanced atomic layer deposition for GaN-based power switches and power amplifiers
2Aluminum oxide – n-Si field effect inversion layer solar cells with organic top contact
3Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
4Comparative study on interface and bulk charges in AlGaN/GaN metal-insulator-semiconductor heterostructures with Al2O3, AlN, and Al2O3/AlN laminated dielectrics
5Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
6Effect of Nitrogen Incorporation in HfO2 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
7Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
8Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
9Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
10Efficiency Enhancement of Nanotextured Black Silicon Solar Cells Using Al2O3/TiO2 Dual-Layer Passivation Stack Prepared by Atomic Layer Deposition
11Electrical and chemical characterization of Al2O3 passivation layer deposited by plasma-assisted atomic layer deposition in c-Si solar cells
12Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
13Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
14Improved understanding of recombination at the Si/Al2O3 interface
15Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
16Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3
17Low-thermal budget flash light annealing for Al2O3 surface passivation
18On the Control of the Fixed Charge Densities in Al2O3 Based Silicon Surface Passivation Schemes
19Passivation effects of atomic-layer-deposited aluminum oxide
20Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
21Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
22Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas
23Room temperature atomic layer deposition of Al2O3 and replication of butterfly wings for photovoltaic application
24Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
25Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
26Trapped charge densities in Al2O3-based silicon surface passivation layers


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