Work Function Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Work Function returned 11 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization
2Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
3Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases
4Plasma-assisted atomic layer deposition and post-annealing enhancement of low resistivity and oxygen-free nickel nano-films using nickelocene and ammonia precursors
5Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
6Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas
7Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition
8The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells
9Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
10Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications
11Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices


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