Lifetime Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Lifetime returned 18 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
2Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition
3Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
4Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions
5Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
6Impact of hydrogen on the permanent deactivation of the boron-oxygen-related recombination center in crystalline silicon
7Improved understanding of recombination at the Si/Al2O3 interface
8Improvement on the Passivation Effect of Al2O3 Layer Deposited by PA-ALD in Crystalline Silicon Solar Cells
9Industrially relevant Al2O3 deposition techniques for the surface passivation of Si solar cells
10Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface
11Injection dependence of the effective lifetime of n-type Si passivated by Al2O3: An edge effect?
12Low-thermal budget flash light annealing for Al2O3 surface passivation
13Oxidation precursor dependence of atomic layer deposited Al2O3 films in a-Si:H(i)/Al2O3 surface passivation stacks
14Passivation effects of atomic-layer-deposited aluminum oxide
15Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
16Plasma nitridation of atomic layer deposition (ALD) Al2O3 by NH3 in plasma-enhanced chemical vapor deposition (PECVD) for silicon solar cell
17Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
18The impact of ultra-thin titania interlayers on open circuit voltage and carrier lifetime in thin film solar cells


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at:


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