Mechanical Properties Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Mechanical Properties returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1The Mechanical Behavior of ALD-Polymer Hybrid Films Under Tensile Strain
2Fabrication and deformation of three-dimensional hollow ceramic nanostructures