CET, capacitance equivalent thickness Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing CET, capacitance equivalent thickness returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1An improvement of HfO2/Ge interface by in situ remote N2 plasma pretreatment for Ge MOS devices
2Effects of Fluorine Plasma Treatment on the Electronic Structure of Plasma-Enhanced Atomic Layer Deposition HfO2
3Enhancement of Electrical Characteristics and Reliability in Crystallized ZrO2 Gate Dielectrics Treated with In-Situ Atomic Layer Doping of Nitrogen
4Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
5Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer deposition
6HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
7Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
8Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
9Improvement in electrical characteristics of HfO2 gate dielectrics treated by remote NH3 plasma
10In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics
11Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
12Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
13Oxygen migration in TiO2-based higher-k gate stacks
14Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure
15Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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