Your search for plasma enhanced atomic layer deposition publications discussing Contact Resistance returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films|
|2||Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs|
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