Nucleation Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Nucleation returned 19 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
2Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
3Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
4In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
5Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
6Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals
7Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
8Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
9Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
10Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
11Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
12Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
13Atomic Layer Deposition of Ru Nanocrystals with a Tunable Density and Size for Charge Storage Memory Device Application
14In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
15Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
16Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
17Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
18Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
19Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry