Your search for publications using this chemistry returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||SiNx||Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics|
|2||SiNx||Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma|
|3||SiNx||Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride|
|4||SiO2||Challenges in atomic layer deposition of carbon-containing silicon-based dielectrics|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: email@example.com
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