3EMAB, TEMAB, (EtMeN)3B, (C2H5CH3)N)3B, Tris(ethylmethylamido)borane, CAS# 0-0-0
Plasma Enhanced Atomic Layer Deposition Film Publications
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Number | Title |
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1 | Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition |