Zr tetra-tert-butoxide, Zr[OC(CH3)3]4, Zr[OC(Me)3]4, ZTB, CAS# 2081-12-1

Where to buy

NumberVendorLink
1Strem Chemicals, Inc.Zirconium(IV) t-butoxide, 99%
2Strem Chemicals, Inc.Zirconium(IV) t-butoxide (99.99%-Zr)
3EpiValenceZirconium tert-butoxide

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberCompositionTitle
1ZrO2Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
2ZrO2Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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