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tris(dimethylamido)-(dimethylamino-2-propanolato)titanium(IV) (TDMADT), CAS# 0-0-0
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor |