TaCl5, Tantalum Pentachloride, CAS# 7721-01-9

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NumberVendorLink
1EpiValenceTantalum chloride

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberCompositionTitle
1TaPlasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers
2TaRadical Enhanced Atomic Layer Deposition of Metals and Oxides
3TaNxEffect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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