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Your search for publications using this chemistry returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Ta||Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers|
|2||Ta||Radical Enhanced Atomic Layer Deposition of Metals and Oxides|
|3||TaNx||Effect of Surface Reduction Treatments of Plasma-Enhanced Atomic Layer Chemical Vapor Deposited TaNx on Adhesion with Copper|
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